turbomolecular

turbomolecular

1. Henning, J., 1988, “Thirty Years of Turbomolecular Pumps: A Review and Recent Developments,” Journal of Vacuum Society Technology, A6, 3, p1196-1201.

杨锦章，1990，”涡轮式分子真空帮浦（续）”，真空科技期刊，第三卷第四期，29-41页。

2. turbomolecular pump

涡轮分子泵

3. Research on the Optimized Design Method of the Geometry Specification of the Vane Arrangement of the Turbomolecular Pump

涡轮分子泵组合叶列几何参数优化设计方法的研究

4. turbomolecular vacuum pump

透平分子真空泵

5. Sekiya, 1990, “Study of the Performance of Turbomolecular Pumps,” Transactions of the Japan Society of Mechanical Engineers Part B, v56 (525), pp1400-1406.

郭锦斌，1999，涡轮分子真空帮浦抽气机构之研究，国立交通大学机械工程学系，硕士论文，新竹。

6. Design and Analysis of High Speed and Efficiency Motor for Turbomolecular Pump

高速高效率分子泵电机设计与分析